Channel epitaxial regrowth flow (CRF)

ABSTRACT

A Fin-FET fabrication approach and structure are provided using channel epitaxial regrowth flow (CRF). The method includes forming a Fin-FET structure including a Si line on a substrate, shallow trench isolation (STI) oxide on both sides of the Si line on the substrate, and a poly wall on top of and across the STI oxide and the Si line, wherein the Si line is higher than the STI oxide from the substrate. The method further includes thinning the STI oxide and the Si line while maintaining about the same height ratio of the Si line and the STI oxide, and forming a spacer wall adjacent to both sides of the poly wall and further adjacent to Si and STI oxide side walls under the poly wall uncovered due thinning the STI oxide and the Si line.

PRIORITY CLAIM

The present invention is a continuation of U.S. patent application Ser.No. 14/512,282, filed on Oct. 10, 2014 entitled “Channel EpitaxialRegrowth Flow (CRF),” which is a divisional of U.S. patent applicationSer. No. 13/791,040, filed on Mar. 8, 2013, and entitled “ChannelEpitaxial Regrowth Flow (CRF),” which applications are incorporatedherein by reference.

TECHNICAL FIELD

The present invention relates generally to a system and method forsemiconductor chip fabrication, and, in particular embodiments, to apatterning approach for channel epitaxial regrowth flow (CRF).

BACKGROUND

Epitaxy refers to the deposition of a crystalline overlayer on acrystalline substrate, where there is one or more preferred orientationsof the overlayer with respect to the substrate. The overlayer is calledan epitaxial film or epitaxial layer. The term shallow trench isolation(STI) is another integrated circuit feature which prevents electricalcurrent leakage between adjacent semiconductor device components. STI,generally used on CMOS process technology nodes of 250 nanometers andsmaller, is created early during the semiconductor device fabricationprocess, e.g., before transistors are formed. The key steps of the STIprocess involve etching a pattern of trenches in silicon (Si),depositing one or more dielectric materials (such as silicon dioxide) tofill the trenches, and removing the excess dielectric.

A Fin-FET is a nonplanar or three-dimensional, multiple-gate transistorstructure built on a Si or other substrate. The distinguishingcharacteristic of the Fin-FET is that the conducting channel is formedwithin a Si fin, which forms the body of the device. The length of thefin (measured in the direction from source to drain) determines theeffective conductive channel length of the device. The conductivechannel is the “stream” through which electrons flow from source todrain on the device. The fin structure can be formed by STI thin down orgrowing Si epi (epitaxial layer), e.g., in STI trenches.

BRIEF DESCRIPTION OF THE DRAWINGS

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawing, in which:

FIGS. 1A to 1D are two-dimensional and three-dimensional views of achannel epi regrowth flow (CRF) for a Fin-FET structure;

FIGS. 2A to 2C are two-dimensional and three-dimensional views ofembodiment fabrication steps of a Fin-FET structure;

FIGS. 3A to 3C are side views of additional embodiment fabrication stepsof a Fin-FET structure; and

FIGS. 4A to 4D are side views of additional embodiment fabrication stepsof a Fin-FET structure.

DETAILED DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

The making and using of the presently preferred embodiments arediscussed in detail below. It should be appreciated, however, that thepresent invention provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are merely illustrative of specific ways to makeand use the invention, and do not limit the scope of the invention.

A Fin-FET structure can be formed using channel epi regrowth flow (CRF).FIGS. 1A to 1D are projected three-dimensional views that illustrateconventional fabrication steps for channel silicon (Si) epi regrowth fora Fin-FET structure. FIG. 1A shows a first step starting with a planarstructure 100. The planar structure 100 includes a Si line 102 formed inthe x direction and a STI oxide (Ox) 104 on both sides of the Si line102. The Si line 102 and the STI Ox 104 are formed on a substrate (notshown), for example a Si substrate. A poly wall structure no is formedon top of the planar structure 100 across the Si line 102 and the STI Ox104, e.g., in the y direction. The poly wall structure no includesPolysilicon (poly) 112 and a hard mask 114 (e.g., a dielectric) on topof the poly Si 112. The poly wall structure no serves as a dummy gatethat is used to form the gate of the Fin-FET structure and is aligned ina direction perpendicular to that of the fin. A seal or spacer 120,e.g., Silicon Nitride (SiN) or a dielectric, is formed on both sides ofthe poly wall structure no to prevent epi (epitaxial) loss on the polyside walls.

FIG. 1B shows a second step of using Ox recess. The Ox recess process isused to thin down the STI Ox 104, e.g., via etching. As a result, theheight of the Si line 102 is also reduced but at a slower rate resultingin variation of height between the STI Ox 104 and the Si line 102. Asshown in FIG. 1B, the Si line 102 becomes higher than the STI Ox 104 asa result of the Ox recess step.

FIG. 1C shows a next step of forming a fin of the Fin-FET structure. Thefin is formed by forming Si epi 106, (e.g. via epitaxial growth) on topof the Si line 102. FIG. 1D shows a subsequent step of adding a secondspacer 130 to prevent source-drain (S/D) epi loss. In this step a secondseal or spacer 130 (e.g., SiN wall) is formed on both sides of the wallstructure no on top of the spacer 120 to cover the exposed vertical sidewalls of STI Ox under the spacer 120. This step can also result in aresidue 140 (e.g., SiN) formed on any exposed or uncovered side walls ofthe Si line 102 under the Si epi 106. The structures in the four stepsabove can be formed using any suitable combination of semiconductorfabrication processes, e.g., including deposition, etching, exposure,etc.

Some of the issues of the conventional CRF above include addressing Siloss due to the Ox recess step. The Ox recess process requires addingthe pillar Si epi 106 on the Si line 102, which in turn requires addinga second seal or spacer (to prevent S/D epi loss). This adds more stepsto the fabrication process including etching the spacer. Further, usingthis conventional CRF that starts with the planar structure 100 makes itdifficult to form a Fin-FET structure with straight or erect STI sidewalls. For example, using a dry tool such as LAM or HITACHI to performthe Ox recess, the Si loss is significant and the best oxide side wallangle of the STI Ox wall exposed after etching under the poly may bearound 86 degrees (tapered side wall). Using the dry tool to perform theOx recess also requires an additional pillar Si epi to counteract the Siloss (as shown above). Forming the pillar Si epi can be difficultrequiring a suitable tuning and process control.

Embodiments of a Fin-FET fabrication approach and structure are providedusing CRF without adding a pillar Si epi after the Ox recess step. Thus,the issues above associated with such step are avoided. The CRF stepsherein start with a three-dimensional Fin-FET structure instead of aplanar structure (e.g., instead of the planar structure 100). TheFin-FET structure includes a Si line for the fin structure. This removesthe need for a adding to spacers during the CRF steps and canfacilitate/improve fabrication. For instance, in the Fin-FET structure,the etch rate of the oxide and the Si becomes about the same, resultingin simultaneous recess of the STI oxide and Si. Thus, a reliable andwell-formed Fin-FET structure can be achieved. The steps also includeusing a Tokyo Electron Limited (TEL) Radial Line Slot Antenna (RLSA)tool for the Ox recess process, which creates a better straight or erectSTI side wall, e.g., with a wall angle at about 88 degrees or more ifthe process is tuned properly.

FIGS. 2A to 2C are two-dimensional and projected three-dimensional views(at different angles) that illustrate the embodiment fabrication stepsfor channel Si/SiGe epi regrowth for a Fin-FET structure. FIG. 2Aincludes 3 different views (at different orientations) of a first stepstarting with a Fin-FET structure (instead of a planar structure). TheFin-FET structure is a three-dimensional structure that is formed usingany suitable combination of semiconductor fabrication processes, e.g.,including deposition, etching, exposure, etc. The Fin-FET structureincludes Si lines 202 formed on a Si substrate 204, e.g., via patterningand etching an initial planar Si substrate 204. The STI oxide 210 canthen be added between the Si lines 202. Alternatively, STI oxide 210 isfirst formed (on a substrate 204) and patterned to include trenchestherein. In other embodiments, the lines 202 and substrate 204 areformed of any other suitable semiconductor material instead of Si.

The height of the STI oxide 210 (from the Si substrate 204) is less thanthe height of the Si lines 202, as shown in FIG. 2A. A dummy gatestructure 225 including poly 220 is positioned on top of the STI oxide210. The poly 220 covers or envelopes the top portions of the Si lines202, as shown in FIG. 2A. The dummy gate 225 also includes a hard mask(HM) 230 positioned on top of the poly 220. An oxide layer 209 may alsobe formed under the poly 220 and above the STI oxide 210 and the coveredportion of Si lines 202. Thus, the first step (which includes multiplefabrication processes) provides a three-dimensional Fin-FET with fin andgate structures. In an embodiment, the height of the Si lines 202 isbetween about 190 to 200 nm, and the height of the formed STI oxide 210is shorter by about 20 to 40 nm. In FIG. 2A, the height of the Si line202 is labeled X, and the height difference between Si lines 202 and STIoxide 210 is labeled Y. The resulting X/Y ratio of the Fin-FET structureis from about 4.7 to 10.

FIG. 2B includes 3 different views (at different orientations) of asecond step of using Ox recess. A TEL RLSA tool is used for the Oxrecess process. Using this tool on the three-dimensional Fin-FETstructure results in about equal etch rate of the STI oxide 210 and theSi lines 202. The Ox recess process is performed on the surface areas,which results in a thinner HM 230. The OX recess also results in thinnerSi lines 202 and STI oxide 210 that are exposed outside the dummy gatestructure 225. The Ox recess process reduces the height of the Si line202 (outside the dummy gate structure 225) to the height of the STIoxide 210 below the poly 211 (inside the dummy gate structure 225). TheHM 230 protects the poly 220 from etching. Since the etch rate is aboutequal for the Si lines 202 and the STI oxide 210, the height differencebetween the Si lines 202 and the STI oxide 210 remains about the same,thus preserving the fin structure.

The RLSA Ox recess process can provide reliable straight STI and finside walls without or reducing tapered side walls. The process resultsin exposing a Si vertical side wall 203 and a STI oxide vertical sidewall 211, as shown in FIG. 2B. In an embodiment, the OX recess processusing RLSA reduces the height of the Si lines 202 to about 140 to 160 nm(e.g., from 190 to 200 nm). The height reduction in the STI oxide 210 isby about 20 to 40 nm. In FIG. 2B, the reduced height for Si lines 202 islabeled X, and the height difference between Si lines 202 and STI oxide210 is labeled Y. The resulting X/Y ratio from the OX recess process isfrom about 3.5 to 8. This ratio is comparable to the X/Y ratio prior tothe OX recess process (4.7 to 10 in FIG. 2A).

FIG. 2C includes 4 different views (at different orientations) of asubsequent step of spacer formation. In this step a seal or spacer 240,e.g., a SiN wall, is formed on both sides of the wall structure 225. Thespacer 240 covers the Si vertical side wall 203, the STI vertical sidewall 211, the side walls of the poly 220, and at least a portion of theside walls of the HM 230, as shown in FIG. 2C. The spacer 240 can beformed using suitable deposition and etch processes. FIG. 2C includes atwo-dimensional view of the resulting structure in the y direction andtwo profiles in the x direction: a first profile cut across the Si (orfin) line 202 and a second profile cut across the STI oxide 210 outsidethe Si line 202.

The embodiment steps above for CRF do not include or need a step foradding a pillar Si epi after the Ox recess step, unlike the conventionalCRF (shown in FIG. 1C). Further, the steps include forming only one sealor spacer to prevent epi loss. Another advantage of using thethree-dimensional Fin-FET structure and the RLSA tool (for OX recess) isachieving more straight or erect (vertical) side walls for the finstructure, which improves device channel performance.

FIGS. 3A to 3C are side views that illustrate additional fabricationsteps for forming the Fin-FET structure. The steps of FIGS. 3A to 3D areimplemented after the steps of FIGS. 2A to 2C. FIG. 3A shows (in both yand x directions according to the coordinates of FIGS. 2A to 2C) a stepof S/D epi formation, where the layers behind the spacer 240 are shown.This step can be implemented after adding the spacer formation step inFIG. 2C. In this step, a top portion of the Si line 202 between gates isremoved (e.g., via etching) and replaced by S/D epi 213 that is formedon top of the remaining portion of the Si line 202 between the gates.The S/D epi 213 forms the fin between the gates and is coupled to the Siline portion enveloped by the poly 220 in the dummy gate structure 225.Thus, electrical current can flow between the S/D epi 213 outside thegate structure and the Si line inside the gate structure.

FIG. 3B shows a next step of adding an Ox filler 260 (e.g., adielectric) in front of the spacer 240 and above the dummy gatestructure 225 (above the HM 230). The Ox filler 260 is formed betweengates and over the S/D epi 213. FIG. 3C shows a following step ofremoving the HM 230. This step also includes removing an excess topportion of the Ox filler 260, which results in about the same height ofthe Ox filler 260, the spacer 240, and the poly 220.

FIGS. 4A to 4D are side views that illustrate additional fabricationsteps for forming the Fin-FET structure. FIG. 4A shows (in both y and xdirections according to the coordinates of FIGS. 2A to 2C) a next stepof poly removal. This step can be implemented after the hard maskremoval step in FIG. 3C. In this step, the poly 220 behind the spacer240 is removed. Further, the oxide layer 209 at the gate location (ontop of the Si line 202 and the STI oxide 210) is removed, leaving the Siline 202 at the gate location exposed.

FIG. 4B shows a channel epi formation step. In this step, a top portionof the Si line 202 at the gate location is removed (e.g., via etching)and replaced by a channel Si/SiGe epi 205 that is formed on top of theremaining portion of the Si line 202 at the gate location. The Si/SiGeepi 205 is coupled (across the spacer 240) to the S/D epi 213 betweenthe gates via the Si line 202 below both the Si epi 205 and the S/D epi213. Thus, electrical current can flow between the Si/SiGe epi 205 atthe gate location and the S/D epi 213 outside the gate location.

FIG. 4C shows a fin formation step. The step includes etching orremoving a top portion of the STI oxide 210 to expose more of thechannel Si/SiGe epi 205 at the gate location. FIG. 4D shows a subsequentstep of adding a metal filler 250 on top of the channel Si/SiGe epi 205and the STI oxide 210 at the gate location to form the gate structure(behind the spacer 240). The metal filler 250 envelopes the top portionof the Si/SiGe epi 205, as shown in FIG. 4D (in the y direction). Themetal filler 250 can be added using any suitable deposition or otherprocess.

A Fin-FET structure was formed using the steps of FIGS. 2A to 2C and cutalong the fin or Si line (in the x direction according to thecoordinates of FIGS. 2A to 2C) after Ox recess and spacer etch. The TELRLSA tool was used to perform the Ox recess processing. The recipedetails of the RLSA Ox recess process include a gas mixture of Argon(Ar) with a flow of 600 standard cubic centimeters per minute (sccm) andOctafluorocyclopentene (C₅F₈) with a flow of 10 sccm, a microwave powerof 2,000 watts with a bias of 400 watts, a pressure of 50 milli-Torr(mT), a center to edge ratio of 1:4, a chuck temperature 80/80 degreesCelsius, and a Chiller temperature of 30 degrees Celsius.

The profile of the cut FinFET structure was captured via a tunnelingelectron microscope (TEM). The TEM pictures show a resulting etch rateratio of STI Ox to Si at about 0.8 to 1.2. In other words, the etch rateis about the same for the two. The pictures also show a resulting STI Oxvertical side wall (at the fin line) with an angle of about 87 to 90degrees and a height (from the substrate) of about 30 to 40 nm.Similarly, the resulting Si vertical side wall (at the fin line) has anangle of about 87 to 90 degrees and a height (from the substrate) ofabout 30 to 40 nm. The results show an improved Fin-FET structure usingthe embodiment CRF steps described above.

In accordance with a preferred embodiment of the present invention, amethod for channel epitaxial regrowth flow, the method includes forminga Fin-FET structure including a Si line on a substrate, STI oxide onboth sides of the Si line on the substrate, and a poly wall on top ofand across the STI oxide and the Si line, wherein the Si line is higherthan the STI oxide from the substrate. The method further includesthinning the STI oxide and the Si line while maintaining about the sameheight ratio of the Si line and the STI oxide, and forming a spacer walladjacent to both sides of the poly wall and further adjacent to Si andSTI oxide side walls uncovered under the poly wall due to thinning theSTI oxide and the Si line.

In accordance with another preferred embodiment of the presentinvention, a method for forming a Fin-FET structure includes forming aSi line on a substrate, forming STI oxide on the substrate on both sidesof the Si line, wherein the Si line is higher than that of the STI oxidefrom the substrate, and forming a poly wall on top of and across the STIoxide and the Si line. The method further includes etching a surface ofthe STI oxide and the Si line outside the poly wall at about the samerate to match a height of the Si line to a height of non-etched STIoxide under the poly wall, and forming a spacer wall on both sides ofthe poly wall, wherein the spacer wall covers Si and STI oxide sidewalls uncovered under the poly wall due to etching the STI oxide and theSi line.

In accordance with another preferred embodiment of the presentinvention, a Fin-FET structure includes a substrate, a Si line on thesubstrate, and STI oxide on the substrate on both sides of the Si line,wherein the Si line is higher than the STI oxide from the substrate. TheFin-FET structure further includes a gate structure on top of and acrossthe STI oxide and the Si line and serving as a gate, wherein the Si lineand the STI oxide include a non-etched portion under the gate structureand an etched portion in front of the gate structure, and a spacer on aside of the gate structure and on side walls of the non-etched portionof the STI oxide and the Si line under the gate structure.

In accordance with an embodiment, a method includes forming a fin-FETstructure including: a fin extending upwards from a substrate; a shallowtrench isolation (STI) region on a side of the fin, and a dummy gatestructure over a first portion of the STI region and a first portion ofthe fin. The fin extends higher than the STI region by a first height.The method also includes simultaneously thinning a second portion of theSTI region and a second portion of the fin. After thinning, the secondportion of the fin extends higher than the second portion of the STIregion by substantially the first height. The method also includesforming a spacer adjacent the dummy gate structure and over the secondportion of the fin and the second portion of the STI region.

In accordance with an embodiment, a method includes formingsemiconductor fin extending higher than a shallow trench isolation (STI)region adjacent the semiconductor fin and forming a dummy gate structureover and extending along sidewalls of the semiconductor fin and over theSTI region. The method further includes after forming the dummy gatestructure, etching the semiconductor fin while etching the STI region atsubstantially a same rate as etching the semiconductor fin. The methodfurther includes forming a first gate spacer and a second gate spacer onopposing sides of the dummy gate structure. The first gate spacer andthe second gate spacer are disposed over the STI region and thesemiconductor fin. The method further includes replacing the dummy gatestructure with a gate structure disposed between the first gate spacerand the second gate spacer.

In accordance with an embodiment, a method includes providing asemiconductor fin adjacent a shallow trench isolation (STI) region. Thesemiconductor fin extends higher than the STI region by a first height.The method further includes disposing a dummy gate structure over afirst portion of the semiconductor fin and a first portion of the STIregion. The dummy gate structure includes: a polysilicon region and ahard mask over the polysilicon region. The method also includes etchinga second portion of the semiconductor fin adjacent the first portion ofthe semiconductor fin. The method also includes while etching the secondportion of the semiconductor fin, etching a second portion of the STIregion adjacent the first portion of the STI region. The hard mask masksthe polysilicon region while etching the second portion of thesemiconductor fin and the second portion of the STI region. The methodalso includes forming a gate spacer extending along a sidewall of thedummy gate structure and along a sidewall of the first portion of theSTI region. The method also includes replacing the dummy gate structurewith a replacement gate.

While this invention has been described with reference to illustrativeembodiments, this description is not intended to be construed in alimiting sense. Various modifications and combinations of theillustrative embodiments, as well as other embodiments of the invention,will be apparent to persons skilled in the art upon reference to thedescription. It is therefore intended that the appended claims encompassany such modifications or embodiments.

What is claimed is:
 1. A method comprising: forming a Fin-FET structureincluding: a fin extending upwards from a substrate; a shallow trenchisolation (STI) region on a side of the fin, wherein the fin extendshigher than the STI region by a first height; and a dummy gate structureover a first portion of the STI region and a first portion of the fin;simultaneously thinning a second portion of the STI region and a secondportion of the fin, wherein after thinning, the second portion of thefin extends higher than the second portion of the STI region bysubstantially the first height; and forming a spacer adjacent the dummygate structure and over the second portion of the fin and the secondportion of the STI region.
 2. The method of claim 1, wherein forming thespacer further comprises forming the spacer on a sidewall of the firstportion of the STI region.
 3. The method of claim 1, whereinsimultaneously thinning the second portion of the STI region and thesecond portion of the fin comprises simultaneously etching the secondportion of the STI region and the second portion of the fin atsubstantially a same rate.
 4. The method of claim 1, wherein the dummygate structure covers the first portion of the STI region and the firstportion of the fin during simultaneously thinning the second portion ofthe STI region and the second portion of the fin.
 5. The method of claim4, wherein after simultaneously the second portion of the STI region andthe second portion of the fin, a top surface of the second portion ofthe fin is substantially level with a top surface of the first portionof the STI region.
 6. The method of claim 1 further comprising afterforming the spacer, replacing a third portion of the fin with asource/drain epitaxial region.
 7. The method of claim 1 furthercomprising: forming an additional spacer on an opposing side of thedummy gate structure as the spacer; removing the dummy gate structure;and forming a replacement gate structure between the spacer and theadditional spacer.
 8. The method of claim 7 further comprising beforeforming the replacement gate structure, at least partially replacing thefirst portion of the fin with a channel epitaxial region.
 9. The methodof claim 8 further comprising after replacing the first portion of thefin, recessing a first portion of the STI region.
 10. A methodcomprising: forming semiconductor fin extending higher than a shallowtrench isolation (STI) region adjacent the semiconductor fin; forming adummy gate structure over and extending along sidewalls of thesemiconductor fin, wherein the dummy gate structure is further disposedover the STI region; after forming the dummy gate structure, etching thesemiconductor fin while etching the STI region at substantially a samerate as etching the semiconductor fin; forming a first gate spacer and asecond gate spacer on opposing sides of the dummy gate structure,wherein the first gate spacer and the second gate spacer are disposedover the STI region and the semiconductor fin; and replacing the dummygate structure with a gate structure disposed between the first gatespacer and the second gate spacer.
 11. The method of claim 10, whereinthe dummy gate structure comprises: a dummy gate electrode; and a hardmask over the dummy gate electrode, wherein the hard mask protects thedummy gate electrode from etching while etching the semiconductor finand the STI region.
 12. The method of claim 10, wherein after etchingthe semiconductor fin, a first top surface of the semiconductor finadjacent the dummy gate structure is lower than a second top surface ofthe semiconductor fin under the dummy gate structure.
 13. The method ofclaim 12, wherein after etching the STI region, a first top surface ofthe STI region adjacent the dummy gate structure is lower than a secondtop surface of the STI region under the dummy gate structure, andwherein a first height difference between the first top surface of thesemiconductor fin and the second top surface of the semiconductor fin issubstantially equal to a second height difference between the first topsurface of the STI region and the second top surface of the STI region.14. The method of claim 13, wherein the first top surface of thesemiconductor fin is substantially level with the second top surface ofthe STI region.
 15. The method of claim 10, wherein forming the firstgate spacer and the second gate spacer comprises forming the first gatespacer or the second gate spacer extending along: a sidewall of thesemiconductor fin; and a sidewall of the STI region substantiallyorthogonal to the sidewall of the semiconductor fin.
 16. A methodcomprising: providing a semiconductor fin adjacent a shallow trenchisolation (STI) region, wherein the semiconductor fin extends higherthan the STI region by a first height; disposing a dummy gate structureover a first portion of the semiconductor fin and a first portion of theSTI region, wherein the dummy gate structure comprises: a polysiliconregion; and a hard mask over the polysilicon region; etching a secondportion of the semiconductor fin adjacent the first portion of thesemiconductor fin; etching a second portion of the STI region adjacentthe first portion of the STI region while etching the second portion ofthe semiconductor fin, wherein the hard mask masks the polysiliconregion while etching the second portion of the semiconductor fin and thesecond portion of the STI region, and wherein the second portion of thesemiconductor fin extends higher than the second portion of the STIregion by about the first height after etching the second portion of thesemiconductor fin and the second portion of the STI region; forming agate spacer extending along a sidewall of the dummy gate structure andalong a sidewall of the first portion of the STI region; and replacingthe dummy gate structure with a replacement gate.
 17. The method ofclaim 16, wherein the STI region comprises an oxide, and wherein etchingthe second portion of the semiconductor fin and etching the secondportion of the STI region comprises using a etchant comprising Argon(Ar), octafluorocyclopentene (C₅F₈), or a combination thereof.
 18. Themethod of claim 16, wherein after etching the second portion of thesemiconductor fin and the second portion of the STI region, a topsurface of the second portion of the semiconductor fin is substantiallylevel with an interface between the dummy gate structure and the firstportion of the STI region.
 19. The method of claim 18, wherein formingthe gate spacer further comprises forming the gate spacer over andextending along sidewalls of the second portion of the semiconductorfin.
 20. The method of claim 16 further comprising: at least partiallyreplacing the second portion of the semiconductor fin with asource/drain epitaxy region; at least partially replacing the firstportion of the semiconductor fin with a channel epitaxy region; andafter at least partially replacing the first portion of thesemiconductor fin, recessing the first portion of the STI region.